Prof. Deleep R. Nair
Professor , Department of Electrical Engineering , IIT Madras
Degree Level
Semiconductor Devices and VLSI Technology
Develop an undergraduate level understanding of semiconductor physics, and use this to study the operation of basic two-terminal and three-terminal semiconductor devices. The students will also be introduced to the unit processes involved in microfabrication and the process integration needed for high volume IC manufacturing.
Taught by
Prof. Deleep R. Nair
Code
EE3106
Credits
4 Credits
Type
Degree
Prerequisites
None
12-Week Roadmap
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Course Structure & Syllabus
For details of standard term assessment timelines and exam structures, visit our Academics page.
Module 1
History and relevance of semiconductor devices in modern world; Solids, Crystals and Electronic grade materials; Formation of energy bands in solids; Concept of hole, Density of states and Fermi level. Intrinsic and extrinsic semiconductors; Equilibrium Carrier concentration; Direct and indirect semiconductors; Recombination and Generation of carriers; Carrier transport – Drift and Diffusion; Equations of state – Continuity and Poisson equation
Module 2
PN junction – energy band diagram, characteristics and modeling; LEDs, Solar cells, Metal Semiconductor contacts.
Module 3
MOS capacitor; MOSFET – energy band diagram, characteristics and modeling; CMOS inverter, Scaled MOSFETs. Bipolar junction transistors – physics and characteristics;
Module 4
Overview of Semiconductor manufacturing; Silicon wafer production; Unit processes – Oxidation, Diffusion, Ion-implantation, Lithography, Deposition, Etching; Fabrication process flow of PN junction diode and MOSFET
Reading List
Prescribed Books & References
- Donald A. Neamen, “Semiconductor Physics and Devices- Basic Principles,” McGraw Hill, 2021
- Robert Pierret, “Semiconductor Device Fundamentals,” Pearson Education, 2006
- James D. Plummer and Peter B. Griffin, “Integrated Circuit Fabrication: Science and Technology,” Cambridge University Press, 2023
- Hong Xiao, “Introduction to Semiconductor Manufacturing Technology,” SPIE press, 2012.
- Jesús A. del Alamo, “Integrated Microelectronic Devices: Physics and Modeling,” Pearson, 2017
- Robert Doering & Yoshio Nishi, "Handbook of Semiconductor Manufacturing Technology," CRC press, 2007
- Amitava DasGupta and Nandita DasGupta, “Semiconductor Devices: Modelling and Technology”, Prentice Hall India, 2004
- S. Karmalkar, “Solid State Devices”, NPTEL video lectures
- Nandita DasGupta, “VLSI Technology” NPTEL video lectures
Faculty & Experts
About the Instructors